Unnamed: 0 int64 0 1.1M | lot_id stringlengths 5 8 | parameter stringclasses 11 values | value float64 -4.83 711 | recipe_id stringclasses 10 values | substrate_id stringlengths 7 11 | step_id int64 1 12 | sum_dtts stringdate 2023-01-01 01:19:32 2023-11-11 04:12:35 |
|---|---|---|---|---|---|---|---|
300 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
301 | lotA0 | UPC1-Flow_STEP_MEAN | 661.773183 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
302 | lotA0 | MFCKFlow_STEP_MEAN | 60.050632 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
303 | lotA0 | MFCEFlow_STEP_MEAN | 81.086028 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
304 | lotA0 | UPC1-Flow_STEP_MEAN | 669.72657 | RecipeC0 | WaferB17 | 12 | 2023-01-01 01:41:32.270 |
305 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.978027 | RecipeC0 | WaferB17 | 7 | 2023-01-01 01:41:37.260 |
306 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB17 | 7 | 2023-01-01 01:41:37.260 |
307 | lotA0 | UPC1-Flow_STEP_MEAN | 45.263672 | RecipeC0 | WaferB17 | 7 | 2023-01-01 01:41:37.260 |
308 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB17 | 8 | 2023-01-01 01:41:38.449 |
309 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB17 | 8 | 2023-01-01 01:41:38.449 |
310 | lotA0 | MFC5Flow_STEP_MEAN | 81.072755 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
311 | lotA0 | MFCNFlow_STEP_MEAN | 134.902 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
312 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.925738 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
313 | lotA0 | MFCEFlow_STEP_MEAN | 81.073776 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
314 | lotA0 | MFC2Flow_STEP_MEAN | 75.016296 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
315 | lotA0 | MFCJFlow_STEP_MEAN | 60.056884 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
316 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
317 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.997551 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
318 | lotA0 | MFCGFlow_STEP_MEAN | 75.007323 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
319 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
320 | lotA0 | UPC1-Flow_STEP_MEAN | 659.25173 | RecipeC0 | WaferB18 | 10 | 2023-01-01 01:42:49.337 |
321 | lotA0 | UPC1-Flow_STEP_MEAN | 669.72657 | RecipeC0 | WaferB18 | 1 | 2023-01-01 01:42:50.267 |
322 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB18 | 7 | 2023-01-01 01:42:55.267 |
323 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.963379 | RecipeC0 | WaferB18 | 7 | 2023-01-01 01:42:55.267 |
324 | lotA0 | UPC1-Flow_STEP_MEAN | 28.476563 | RecipeC0 | WaferB18 | 7 | 2023-01-01 01:42:55.267 |
325 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB18 | 8 | 2023-01-01 01:42:56.466 |
326 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.960449 | RecipeC0 | WaferB18 | 8 | 2023-01-01 01:42:56.466 |
327 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.960164 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
328 | lotA0 | MFCJFlow_STEP_MEAN | 60.056884 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
329 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.004034 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
330 | lotA0 | MFCXFlow_STEP_MEAN | 0.002274 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
331 | lotA0 | MFC2Flow_STEP_MEAN | 75.162841 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
332 | lotA0 | MFCEFlow_STEP_MEAN | 81.068263 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
333 | lotA0 | MFC5Flow_STEP_MEAN | 81.063848 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
334 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
335 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
336 | lotA0 | UPC1-Flow_STEP_MEAN | 660.735787 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
337 | lotA0 | MFCNFlow_STEP_MEAN | 134.898295 | RecipeC0 | WaferB19 | 10 | 2023-01-01 01:44:07.357 |
338 | lotA0 | UPC1-Flow_STEP_MEAN | 26.015625 | RecipeC0 | WaferB19 | 7 | 2023-01-01 01:44:13.266 |
339 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB19 | 7 | 2023-01-01 01:44:13.266 |
340 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB19 | 7 | 2023-01-01 01:44:13.266 |
341 | lotA0 | UPC1-Flow_STEP_MEAN | -4.394531 | RecipeC0 | WaferB19 | 8 | 2023-01-01 01:44:14.414 |
342 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.960449 | RecipeC0 | WaferB19 | 8 | 2023-01-01 01:44:14.414 |
343 | lotA0 | MFCEFlow_STEP_MEAN | 81.072755 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
344 | lotA0 | MFC5Flow_STEP_MEAN | 81.06377 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
345 | lotA0 | MFC2Flow_STEP_MEAN | 75.129346 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
346 | lotA0 | MFCNFlow_STEP_MEAN | 134.932248 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
347 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
348 | lotA0 | UPC1-Flow_STEP_MEAN | 660.440415 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
349 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
350 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.001753 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
351 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.927213 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
352 | lotA0 | MFCJFlow_STEP_MEAN | 60.056884 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
353 | lotA0 | MFCXFlow_STEP_MEAN | 0.00447 | RecipeC0 | WaferB20 | 10 | 2023-01-01 01:45:25.271 |
354 | lotA0 | UPC1-Flow_STEP_MEAN | 669.72657 | RecipeC0 | WaferB20 | 12 | 2023-01-01 01:45:26.261 |
355 | lotA0 | UPC1-Flow_STEP_MEAN | 33.134766 | RecipeC0 | WaferB20 | 7 | 2023-01-01 01:45:31.271 |
356 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB20 | 7 | 2023-01-01 01:45:31.271 |
357 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.970703 | RecipeC0 | WaferB20 | 7 | 2023-01-01 01:45:31.271 |
358 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.982422 | RecipeC0 | WaferB20 | 8 | 2023-01-01 01:45:32.264 |
359 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB20 | 8 | 2023-01-01 01:45:32.264 |
360 | lotA0 | MFC5Flow_STEP_MEAN | 81.070819 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
361 | lotA0 | UPC1-Flow_STEP_MEAN | 658.891522 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
362 | lotA0 | MFCKFlow_STEP_MEAN | 60.04912 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
363 | lotA0 | MFCNFlow_STEP_MEAN | 134.979786 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
364 | lotA0 | MFC2Flow_STEP_MEAN | 75.183179 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
365 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
366 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.93459 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
367 | lotA0 | MFCEFlow_STEP_MEAN | 81.061524 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
368 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.999832 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
369 | lotA0 | MFCXFlow_STEP_MEAN | 0.002274 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
370 | lotA0 | MFCJFlow_STEP_MEAN | 60.058195 | RecipeC0 | WaferB21 | 10 | 2023-01-01 01:46:43.268 |
371 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB21 | 7 | 2023-01-01 01:46:49.270 |
372 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.017822 | RecipeC0 | WaferB21 | 7 | 2023-01-01 01:46:49.270 |
373 | lotA0 | UPC1-Flow_STEP_MEAN | 112.426759 | RecipeC0 | WaferB21 | 7 | 2023-01-01 01:46:49.270 |
374 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.967774 | RecipeC0 | WaferB21 | 8 | 2023-01-01 01:46:50.268 |
375 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB21 | 8 | 2023-01-01 01:46:50.268 |
376 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
377 | lotA0 | MFCJFlow_STEP_MEAN | 60.050632 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
378 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.946885 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
379 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
380 | lotA0 | UPC1-Flow_STEP_MEAN | 658.999586 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
381 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000312 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
382 | lotA0 | MFCGFlow_STEP_MEAN | 74.992968 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
383 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
384 | lotA0 | MFC2Flow_STEP_MEAN | 75.031249 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
385 | lotA0 | MFC5Flow_STEP_MEAN | 81.070219 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
386 | lotA0 | MFCEFlow_STEP_MEAN | 81.06765 | RecipeC0 | WaferB22 | 10 | 2023-01-01 01:48:01.385 |
387 | lotA0 | UPC1-Flow_STEP_MEAN | 23.027343 | RecipeC0 | WaferB22 | 7 | 2023-01-01 01:48:07.267 |
388 | lotA0 | ThrottleValveAngle_STEP_MEAN | 6 | RecipeC0 | WaferB22 | 7 | 2023-01-01 01:48:07.267 |
389 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.985352 | RecipeC0 | WaferB22 | 7 | 2023-01-01 01:48:07.267 |
390 | lotA0 | UPC1-Flow_STEP_MEAN | -3.735352 | RecipeC0 | WaferB22 | 8 | 2023-01-01 01:48:09.265 |
391 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.008057 | RecipeC0 | WaferB22 | 8 | 2023-01-01 01:48:09.265 |
392 | lotA0 | UPC1-Flow_STEP_MEAN | 3.076172 | RecipeC0 | WaferB23 | 9 | 2023-01-01 01:48:19.273 |
393 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
394 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.999111 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
395 | lotA0 | MFCJFlow_STEP_MEAN | 60.05517 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
396 | lotA0 | MFC2Flow_STEP_MEAN | 75.007324 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
397 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
398 | lotA0 | UPC1-Flow_STEP_MEAN | 663.45175 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
399 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB23 | 10 | 2023-01-01 01:49:20.272 |
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