Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
200
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.987226
|
RecipeC0
|
WaferB11
| 10
|
2023-01-01 01:33:42.267
|
201
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 669.72657
|
RecipeC0
|
WaferB11
| 12
|
2023-01-01 01:33:43.268
|
202
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.961914
|
RecipeC0
|
WaferB11
| 7
|
2023-01-01 01:33:48.267
|
203
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 42.978515
|
RecipeC0
|
WaferB11
| 7
|
2023-01-01 01:33:48.267
|
204
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.91
|
RecipeC0
|
WaferB11
| 7
|
2023-01-01 01:33:48.267
|
205
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC0
|
WaferB11
| 8
|
2023-01-01 01:33:50.270
|
206
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.000733
|
RecipeC0
|
WaferB11
| 8
|
2023-01-01 01:33:50.270
|
207
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.076172
|
RecipeC0
|
WaferB12
| 9
|
2023-01-01 01:34:00.267
|
208
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94541
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
209
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 675.007205
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
210
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.999832
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
211
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.053657
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
212
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.066016
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
213
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
214
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.086028
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
215
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.03125
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
216
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
217
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
218
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.050632
|
RecipeC0
|
WaferB12
| 10
|
2023-01-01 01:35:01.264
|
219
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB12
| 7
|
2023-01-01 01:35:06.264
|
220
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 66.181641
|
RecipeC0
|
WaferB12
| 7
|
2023-01-01 01:35:06.264
|
221
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC0
|
WaferB12
| 7
|
2023-01-01 01:35:06.264
|
222
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.000733
|
RecipeC0
|
WaferB12
| 8
|
2023-01-01 01:35:08.274
|
223
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC0
|
WaferB12
| 8
|
2023-01-01 01:35:08.274
|
224
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.076172
|
RecipeC0
|
WaferB13
| 8
|
2023-01-01 01:35:18.264
|
225
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC0
|
WaferB13
| 8
|
2023-01-01 01:35:18.264
|
226
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 662.140596
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
227
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.08174
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
228
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.066171
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
229
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.032447
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
230
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.053657
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
231
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.930164
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
232
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.935338
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
233
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.046094
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
234
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
235
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.995839
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
236
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998271
|
RecipeC0
|
WaferB13
| 10
|
2023-01-01 01:36:19.262
|
237
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB13
| 7
|
2023-01-01 01:36:24.262
|
238
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 86.83594
|
RecipeC0
|
WaferB13
| 7
|
2023-01-01 01:36:24.262
|
239
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.978027
|
RecipeC0
|
WaferB13
| 7
|
2023-01-01 01:36:24.262
|
240
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC0
|
WaferB13
| 8
|
2023-01-01 01:36:26.261
|
241
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC0
|
WaferB13
| 8
|
2023-01-01 01:36:26.261
|
242
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB14
| 7
|
2023-01-01 01:36:36.271
|
243
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC0
|
WaferB14
| 7
|
2023-01-01 01:36:36.271
|
244
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.932252
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
245
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.03125
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
246
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.086028
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
247
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 660.094615
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
248
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
249
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.943443
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
250
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.052145
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
251
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.006823
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
252
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.000432
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
253
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.070509
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
254
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB14
| 10
|
2023-01-01 01:37:37.269
|
255
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB14
| 7
|
2023-01-01 01:37:43.268
|
256
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.995606
|
RecipeC0
|
WaferB14
| 7
|
2023-01-01 01:37:43.268
|
257
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 21.796875
|
RecipeC0
|
WaferB14
| 7
|
2023-01-01 01:37:43.268
|
258
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC0
|
WaferB14
| 8
|
2023-01-01 01:37:44.468
|
259
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB14
| 8
|
2023-01-01 01:37:44.468
|
260
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
261
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.072755
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
262
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 662.68811
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
263
|
lotA0
|
MFCGFlow_STEP_MEAN
| 75.007323
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
264
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
265
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.031249
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
266
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
267
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99695
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
268
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.933115
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
269
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.056683
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
270
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB15
| 10
|
2023-01-01 01:38:55.408
|
271
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 30.673828
|
RecipeC0
|
WaferB15
| 7
|
2023-01-01 01:39:01.265
|
272
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.994141
|
RecipeC0
|
WaferB15
| 7
|
2023-01-01 01:39:01.265
|
273
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB15
| 7
|
2023-01-01 01:39:01.265
|
274
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB15
| 8
|
2023-01-01 01:39:02.275
|
275
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC0
|
WaferB15
| 8
|
2023-01-01 01:39:02.275
|
276
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC0
|
WaferB15
| 9
|
2023-01-01 01:39:11.285
|
277
|
lotA0
|
MFCKFlow_STEP_MEAN
| 60.052246
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
278
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
279
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 661.780387
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
280
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.997551
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
281
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.999041
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
282
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.00447
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
283
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.073142
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
284
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
285
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.938525
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
286
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.061523
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
287
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.103027
|
RecipeC0
|
WaferB16
| 10
|
2023-01-01 01:40:13.363
|
288
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 29.53125
|
RecipeC0
|
WaferB16
| 7
|
2023-01-01 01:40:19.273
|
289
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB16
| 7
|
2023-01-01 01:40:19.273
|
290
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.982422
|
RecipeC0
|
WaferB16
| 7
|
2023-01-01 01:40:19.273
|
291
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
|
RecipeC0
|
WaferB16
| 8
|
2023-01-01 01:40:20.492
|
292
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB16
| 8
|
2023-01-01 01:40:20.492
|
293
|
lotA0
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
294
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.053657
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
295
|
lotA0
|
MFCGFlow_STEP_MEAN
| 74.999041
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
296
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.99743
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
297
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.070219
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
298
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.019287
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
299
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.932623
|
RecipeC0
|
WaferB17
| 10
|
2023-01-01 01:41:31.272
|
Subsets and Splits
No community queries yet
The top public SQL queries from the community will appear here once available.